Hangzhou Freqcontrol Electronic Technology Ltd.
Hangzhou Freqcontrol Electronic Technology Ltd. We Grow Crystal. We Fabricate Wafer. We are Piezoelectric Specialist.
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Fused Silica Wafer is an optical-grade monocrystalline wafer made of quartz material, also known as fused quartz or fused silica. It has excellent optical properties, such as transmission range from 0.17 to 2.1um, 0.26 to 2.1um and 0.0185 to 3.5um, warp less than 35um, FLH Models such as JGS1, JGS2, JGS3 and F-HUV, second flat per request, and surface roughness Ra less than 1.0nm. In comparison with other materials such as calcium silicate board and borosilicate glass, it has higher optical transmission, less thermal expansion coefficient, and better homogeneity. Fused Silica Wafer is the ideal material for high-precision optical components, such as lenses, windows, and prisms.
| Material | UV Fused Silica, Fused Quartz (JGS1, JGS2, JGS3) | ||||||
| Specification | unit | 3” | 4” | 5" | 6" | 8" | 12" |
| Diameter (or Square) | mm | 76.2 | 100 | 125 | 150 | 200 | 300 |
| Tol(±) | mm | <0.1~0.25 mm | |||||
| Thinnest Thickness | mm | >0.10 | >0.10 | >0.30 | >0.30 | >0.30 | >0.50 |
| Primary Flat | mm | 22 | 32.5 | 42.5 | 57.5/notch | notch | notch |
| LTV (5mmx5mm) | µm | <2 | <2 | <2 | <2 | <2 | <10 |
| TTV | µm | <8 | <10 | <15 | <20 | <30 | <30 |
| Bow | µm | ±20 | ±25 | ±40 | ±40 | ±60 | ±60 |
| Warp | µm | <30 | <40 | <50 | <50 | <60 | <60 |
| PLTV(<0.5um) | % | ≥95%(5mm*5mm) | |||||
| Transmittance | UV, Optical, IR or Custom option | ||||||
| Edge Rounding | mm | Compliant with SEMI M1.2 Standard/refer to IEC62276 | |||||
| Surface Type | Single Side Polished /Double Sides Polished | ||||||
| Polished side Ra | nm | <1.0nm or specific per requested | |||||
| Back Side Criteria | µm | General is 0.2-0.5µm or as customized | |||||
| Appearance | Contamination | None | |||||
| Particles>0.3µm | <=30 | ||||||
| Saw Marks, striations | None | ||||||
| Scratch | None | ||||||
| Cracks, saw marks, stains | None | ||||||
| Parameters | Specifications |
|---|---|
| Parallelism | 3 Arc Sec |
| Warp | <35um |
| Transmission | IR, Visible, DUV |
| Density | 2.20g/cm3 |
| Certificate | ISO9001, RoHS |
| OH Content | <5ppm, <10ppm, <100ppm |
| Damage Threshold | >10J/cm2 |
| FLH Model | JGS1, JGS2, JGS3, F-HUV |
| Thickness | 0.1-10mm |
| Surface Quality | 20-10 |
| Fused Quartz Labware | High Purity Fused Silica |
| Aluminum Silicate Glass | Yes |
We provide technical support and service for Fused Silica Wafer. Our experienced technicians and engineers can provide the following services:
If you have any questions or need support for your Fused Silica Wafer, please contact us for more information.